Semiconductor Process & Metrology
Marketing & Management Expertise
For Emerging Technologies
Representing
Optical Scanning Systems
High Temperature Innovations
High Temperature Innovations
- Full-surface defect detection, classification & mapping.
- For any form-factor of transparent, translucent, and opaque substrates
- Fully automated systems for semiconductor substrates.
- Semi-automated tools for varying shapes of substrates.
High Temperature Innovations
High Temperature Innovations
High Temperature Innovations
- Atmospheric and LPCVD Systems
- Compact Thermal Reactors
- Horizontal Thermal Reactors
- Vertical Thermal Reactors
Surface & Film Measurement
High Temperature Innovations
Surface & Film Measurement
- High Throughput Optical Metrology
- Multilayer Measurement of Bonded Wafer Assemblies
- Substrate Thickness & Shape including, TTV, Bow, Warp & Stress.
- Thin Film Measurement
- AFM Quality Surface Topology & Profilometry
- Automated & Semi-Automated Systems